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High-temperature graphitization furnace empty-fire purification: a crucial process that cannot be skipped before high-purity products are put into pro

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High-temperature graphitization furnace empty-fire purification: a crucial process that cannot be skipped before high-purity products are put into pro
Glance over:- Release date:May 18, 2026【Big In Small
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New Furnace Dry Burning Purification: A Crucial Step That Cannot Be Ski"&"pped Before High-Purity Product Production

About three years ago, a customer who made semiconductor-grade graphite was eager to put his new equipment into production as soon as it was installed and debugged. I understood his feelings—the project "&"schedule was tight, and of course, he wanted to use the equipment as soon as it arrived. But I stopped him at the time, saying, ""Don't rush, there's still an important step that hasn't been done: high-temperature dry burning purification."" He didn't qui"&"te understand at the time, thinking that the equipment had already been tested before leaving the factory, so why burn it again? He probably thought it was just a pure waste of electricity.

I told him that factory testing, dry burning, furnace dry"&"ing, and high-temperature purification are two different things.

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Factory testing verifies whether the equipment can function properly. Furnace empty-fire purification aims to clean the internal environment of the furnace to meet the requirements of hi"&"gh-purity processes. In new furnaces or furnaces after major repairs, insulation materials, heating elements, and the metal surface of the furnace shell will absorb moisture, grease, and volatile organic compounds. If these substances are not thoroughly r"&"emoved through high-temperature empty-fire purification, the first batch of high-purity products will have all the contaminants transferred to the products, resulting in substandard purity. What does empty-fire purification do? Simply put, it's about """&"using high temperatures to remove everything that shouldn't be there."" Includes:
  • Moisture: Atmospheric moisture adsorbed on insulation materials and metal surfaces
  • Grease: Residual processing oils and"&" rust-preventive oils from the manufacturing process
  • Volatile Organic Compounds: Residual adhesives and organic matter released from packaging materials
  • Surface Oxide Layer: Decomposition of the oxide "&"film on the metal surface under high-temperature reducing atmosphere

Standard Dry Burn Process
  1. Completely replace the air inside the furnace with a protective gas (high-purity nitrogen or argon).
  2. Slowly raise the temp"&"erature to 150-200℃ under full vacuum, hold for 2-4 hours to allow moisture to evaporate fully, and use a vacuum pump to remove the sublimated water vapor from the furnace.
  3. Continue to slowly raise the temperature under full vacuum to 800-1000℃,"&" hold for 4-8 hours to remove organic matter.
  4. Raise to the maximum operating temperature and hold for several hours to ensure thorough degassing of all components inside the furnace.
  5. After cooling, check the vacuum level or background "&"impurity concentration to confirm compliance.

The entire process may require repeated 2-3 cycles, taking several days, until the furnace background environment meets the process requirements and the temperature reaches the"&" level specified in the contract before delivery to the customer.

The customer later followed the advice and performed dry-firing purification, and the purity of the first batch of products met the standards. However, another competitor, rushing to st"&"art production at the same time, skipped this step, resulting in the entire first batch of semiconductor-grade graphite failing to meet purity standards, leading to huge losses. The dry-firing and high-temperature purification process for new furnaces is "&"absolutely essential and cannot be omitted.")