Overview

The Bottom Loading Multi-Station Chemical Vapor Deposition Furnace is an advanced piece of equipment developed by Yuanhang Industrial Furnace specifically for the preparation of pyrolytic carbon, carbon/carbon (C/C) composites, ultra-high temperature ceramics (C/SiC), and graphene coatings. During the chemical vapor deposition (CVD) process, reactive gases are introduced into a high-temperature reaction chamber, where they undergo thermal decomposition, and the resulting products are precisely deposited onto substrates to form high-performance thin films. The combination of a bottom-loading mechanism and a multi-station design not only enhances operational convenience but also achieves a quantum leap in production capacity.

Image: Yuanhang Industrial Furnace - Bottom Loading Multi-Station CVD Deposition System (Customizable Sizes Available)

Specs

Core Advantages of Yuanhang CVD Deposition Furnace

1.Extreme Uniformity: Equipped with a constant-speed rotating platform to ensure coating consistency on surfaces of complex-shaped parts.
2. High-Purity Gas Circuit Management: Features multiple mass flow controllers and multi-stage gas mixing input for precise and controllable flow rates.
3. Environmental Protection & Purification: Equipped with a high-efficiency condensation collection system (>90%) that effectively recovers exhaust gases and reduces furnace deposits.
4. Comprehensive Safety Assurance: Integrates functions such as three-phase imbalance protection, combustible gas leakage alarm, and cooling water flow interruption protection.
5. Exceptional Stability: The design fully considers the corrosive environment of CVD processes, ensuring long-term stable operation of core components.

Process Flow

→ Machining → Graphitization → Ceramization → Subsequent Processing