Bottom Loading Multi-Station Chemical Vapor Deposition Furnace

Name: Bottom Loading Multi-Station Chemical Vapor Deposition Furnace
Brand: YuanHang

Structural Advantage: The bottom-loading structure greatly facilitates the smooth loading and unloading of large-sized, heavy workpieces, reducing the risk of damage to the furnace chamber and heating elements. High-Efficiency Output: Supports 1-3 optional workstations and can be equipped with multiple rotating platforms with uniform speed to ensure coating deposition uniformity and batch stability. Precise Temperature Control: Maximum operating temperature of 1250°C with temperature control accuracy of ±0.1°C. Equipped with multiple mass flow controllers and a high-efficiency condenser (collection rate >90%), meeting the requirements of various complex CVD processes.

Product details

Overview

The Bottom Loading Multi-Station Chemical Vapor Deposition Furnace is an advanced piece of equipment developed by Yuanhang Industrial Furnace specifically for the preparation of pyrolytic carbon, carbon/carbon (C/C) composites, ultra-high temperature ceramics (C/SiC), and graphene coatings. During the chemical vapor deposition (CVD) process, reactive gases are introduced into a high-temperature reaction chamber, where they undergo thermal decomposition, and the resulting products are precisely deposited onto substrates to form high-performance thin films. The combination of a bottom-loading mechanism and a multi-station design not only enhances operational convenience but also achieves a quantum leap in production capacity.

Image: Yuanhang Industrial Furnace - Bottom Loading Multi-Station CVD Deposition System (Customizable Sizes Available)

Specs

Model Specifications (φ*h mm)

Model Specifications (φ*h mm)	Power Rating (KW)	Temperature Difference (℃)	Working Stations	Ultimate Vacuum (pa)
600 X 600	60	±5	1	10
1000 X 1000	90	±5	1 - 3	10
2000 X 2000	200	±5	1 - 3	10

* Performance Specification: Temperature control accuracy ±0.1℃, measured uniformity at 12 points by temperature measurement rings < ±3℃.

Core Advantages of Yuanhang CVD Deposition Furnace

1.Extreme Uniformity: Equipped with a constant-speed rotating platform to ensure coating consistency on surfaces of complex-shaped parts.
2. High-Purity Gas Circuit Management: Features multiple mass flow controllers and multi-stage gas mixing input for precise and controllable flow rates.
3. Environmental Protection & Purification: Equipped with a high-efficiency condensation collection system (>90%) that effectively recovers exhaust gases and reduces furnace deposits.
4. Comprehensive Safety Assurance: Integrates functions such as three-phase imbalance protection, combustible gas leakage alarm, and cooling water flow interruption protection.
5. Exceptional Stability: The design fully considers the corrosive environment of CVD processes, ensuring long-term stable operation of core components.