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Silicon Carbide Recrystallization Sintering Furnace

The Small Atmosphere Vacuum Box Furnace is a newly developed furnace model by our company. It features high temperature control accuracy of ≤0.1°C, excellent temperature uniformity of ±2°C, and can reach temperatures up to 2300°C. With a compact footprint and flexible operation, it is especially suitable for small-scale production or laboratory use.

Small Atmosphere Vacuum Box High-Temperature Furnace

The Small Atmosphere Vacuum Box High-Temperature Furnace is a newly developed furnace model by our company. It features high temperature control accuracy of ≤0.1°C, excellent temperature uniformity of ±2°C, and can reach temperatures up to 2300°C. With a compact footprint and flexible operation, it is especially suitable for small-scale production or laboratory use.

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Product Parameters

  1. 1.Model: YHGYL-THL45/45-50

  2. 2.Heating Method: Isostatic Graphite Resistance Heating

  3. 3.Power Control: Low DC Voltage, High Current Mode

  4. 4.Designed Power: 60KW; Actual Production Power: ≤50KW

  5. 5.Power Supply: Three-Phase Five-Wire System, 380V, 50Hz

  6. 6.Design Temperature: 2100°C; Long-Term Operating Temperature: 2000°C

  7. 7.Cooling Method: Natural Cooling

  8. 8.Effective Charging Space: Width 450mm x Height 450mm x Depth 500mm

  9. 9.Heating Rate: Average heating rate ≤5°C/min below 1000°C (under load), ≤5°C/min between 1000-1800°C, ≤3°C/min between 1800-2250°C.

  10. 10.Temperature Control Accuracy: RT - 2000°C ≤ ±2°C

  11. 11.Power Supply Configuration: Integrated with the furnace body

  12. 12.Furnace Type: Horizontal, front door discharge

  13. 13.Working Atmosphere: Vacuum or gases such as Ar, N2, NH? (slight positive pressure), with vacuum purging.

  14. 14.Temperature Uniformity: ≤ ±3°C (evaluated after 30 minutes of soaking)

  15. 15.Temperature Measurement: Single-zone tungsten-sheathed tungsten-rhenium thermocouple

  16. 16.Temperature Control: Shimaden FP23 (Japan) PID intelligent temperature controller (control accuracy: ±0.1°C) and manual control.

  17. 17.Protection Methods: PLC + Touch Screen + Audible and Visual Alarm

  18. 18.Vacuum System Configuration: 2H-70 Sliding Vane Pump

  19. 19.Vacuum Measurement: Pirani + Capacitance Diaphragm Vacuum Gauge, measurement range 0-10? Pa

  20. 20.Pressure Rise Rate: After pumping down to 5Pa and stopping the pump for 30 minutes, the pressure rise is ≤10 Pa per hour.

  21. 21.Ultimate Vacuum (Cold State): ≤5Pa (Under clean, cold, and empty furnace conditions)

  22. 22.Empty Furnace Evacuation Time: ≤20min (empty furnace, room temperature, tested according to GB/T10066.1-2004)

  23. 23.Maximum Internal Furnace Pressure: 0.02Mpa

  24. 24.Bursting Disc Activation Pressure: 0.07Mpa

  25. 25.Cooling System: All circulating water pipes have good sealing performance with no leakage during operation.

  26. 26.Electrical Control: Siemens PLC + Delta 15-inch Touch Screen. Key parameters such as vacuum level, temperature, and power can be queried in real-time and historically, exported via USB, and equipped with a paperless recorder.

  27. 27.Key components use imported materials, such as temperature control instruments and pyrometers.

  28. 28.Cover Opening Method: Manual

  29. 29.Material Loading/Unloading Method: Equipped with a dedicated loading/unloading trolley

  30. 30.Paint Color: Main body off-white, frame sky blue, base black.


To address the significant temperature rise lag in the furnace's low-temperature section, multi-stage AI self-learning PID and temperature control curve fitting technologies are employed. This ensures consistent temperature control accuracy between the low-temperature and high-temperature sections, achieving ≤ ±2°C

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Product Characteristics

  1. 1.Maximum Operating Temperature: 2300°C; Typical Operating Temperature: 2250°C.

  2. 2.Working Atmosphere: Suitable for air atmosphere, vacuum sintering, or reducing atmosphere sintering (slight positive pressure).

  3. 3.Temperature Measurement: Combination of thermocouple and far-infrared optical pyrometer for temperature measurement.

  4. 4.Temperature Control: Programmable control and manual control; Control Accuracy: ±0.1°C.

  5. Click to download detailed information:

  6. -recrystallization-sintering-furnace-for-silicon-carbide.pdf

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