Bottom Discharge CVD/Carbonization Furnace

Name: Bottom Discharge CVD/Carbonization Furnace
Brand: YuanHang

Equipment Use: Primarily used for CVD and CVI processes to produce high-performance composite materials such as C/C, C/SiC, and SiC/SiC. Core Advantages: The bottom-loading/unloading structure design greatly facilitates the handling of large-sized, heavy carbon workpieces and enables continuous production, with a maximum design temperature of 2100°C. Technical Support: Features isostatic graphite resistance heating with low-voltage, high-current control, equipped with a Siemens PLC and a 15-inch touch screen, supporting fully automatic process programming and data export.

Product details

Overview

Chemical Vapor Deposition (CVD) is a process in which precursor gases undergo thermal decomposition to generate reaction products that deposit onto a substrate, forming thin films or densifying the matrix. The bottom-discharge CVD/Carbonization Furnace developed by Yuanhang Industrial Furnace is specifically designed for applications such as carbon/carbon (C/C) composites and silicon carbide (SiC) coatings, serving as the core key equipment for achieving densification of high-performance materials.

Image: Yuanhang Industrial Furnace - Bottom Discharge CVD/Carbonization Furnace in Practical Operation

Applications

? Carbon Brake Discs for Civil Aircraft
? C/C Hot Zones for Monocrystalline Silicon Growth Furnaces
? Structural Components for Polycrystalline Silicon Ingot Furnaces
? High-Temperature C/C Structural Parts
? C/C-SiC Composites
? C/C Guide Cylinders / Insulation Cylinders / Crucible Supports

Technical Specs

Heating Method	Isostatic Graphite Resistance Heating (Low-Voltage, High-Current Mode)
Design/Operating Temperature	Maximum Temperature: 2100°C / Long-Term Operating Temperature: 2000°C
Temperature Control Accuracy	±0.1℃(Controlled by Shimaden (Japan) Precision Instruments)
Ultimate Vacuum	≤ 5Pa(Under Cold, Empty Furnace Condition)
Constant Pressure Control	Fully automatic slight positive pressure Constant Pressure Control within the range of 100-7500 Pa
Control System	Siemens PLC + 15-inch Delta Touch Screen (with Historical Data Export)
Effective Charging Space	Provided in non-standard dimensions customized to customer process requirements

System Features

1.Multi-Stage Gas Circuit Management: Equipped with Beijing Sevenstar Mass Flow Controllers for precise control of precursor and protective gas flow rates.
2.High-Safety Design: Fully equipped with an audible and visual alarm system, PLC logic interlock, and multiple over-temperature protection mechanisms.
3.Customized Material Handling: Configured with dedicated bottom-discharge loading/unloading trolleys, significantly enhancing production efficiency and reducing labor intensity.
4.Precision Vacuum Control: Utilizes a combination of Pirani and capacitive diaphragm vacuum gauges to achieve full-range, high-precision vacuum measurement and feedback.