YUAN HANG INDUSTRIAL FURNACES TECHNOLOGY 0-3200℃

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Large Horizontal Square CVD/High-Temperature Furnace

Large Horizontal Square CVD/High-Temperature Furnace

Equipment Features: Designed with a square heating chamber, which increases space utilization by over 30% when processing plates and square workpieces compared to a circular cross-section. Core Functions: Integrates chemical vapor deposition (CVD) and chemical vapor infiltration (CVI) processes, with a maximum temperature of up to 2100°C, meeting the long-cycle densification requirements of composites such as C/C and C/SiC. Intelligent Integration: Features an integrated power supply cabinet design, equipped with multi-zone precision temperature control and mass flow controllers, supporting one-touch programmed operation for complex process curves.

Overview

The Large Horizontal Square CVD/CVI Furnace is a high-capacity production equipment developed by Yuanhang Industrial Furnace for advanced composite materials. By introducing gaseous precursors (such as propylene, methane, etc.) into a high-temperature environment, thermal decomposition reactions occur within the pores or on the surfaces of the workpieces. The horizontal square structure not only facilitates forklift loading and unloading but also enables efficient deposition for large-scale plates and cylindrical workpieces.

大型卧式方形CVD气相沉积炉实拍

Image: Yuanhang Industrial Furnace - Large Horizontal Square CVD Equipment On-Site (Dimensions Customizable Upon Request)

Technical Specs

Heating Chamber Structure Horizontal Square Type (Isostatic Graphite Resistance Heating)
Max./Operating Temperature 2100℃ / 2000℃
Temperature Uniformity ≤ ±5℃（多区独立控温）
Cold State Vacuum ≤ 5Pa(Supports 100-7500Pa Automatic Constant Pressure Control)
Gas Circuit Control Beijing Sevenstar Mass Flow Controllers (Ar, N2, CH4, C3H6, etc.)
Automation Level Siemens PLC + Delta 15-inch Touch Screen + Process Data Export


Applications

Carbon/Carbon (C/C) Composites

Used for the deposition and densification of aviation brake discs, as

well as hot zone materials for monocrystalline/polycrystalline

silicon (crucibles, guide cylinders, plates).

Carbon/Silicon Carbide Composites (C/SiC)

High-performance ceramic matrix composites prepared via the

CVI process to enhance material oxidation resistance in ultra-high

temperature environments.

High-Temperature Coating Preparation

Deposition of functional coatings such as SiC and PyC (pyrolytic carbon) on graphite substrates to

extend the service life of graphite components.

Why Choose the Yuanhang Square CVD Furnace?

  • ??Loading Efficiency:The square furnace chamber maximizes space utilization when stacking plates, resulting in significantly higher throughput per batch compared to circular furnaces.
    ??Precise Temperature Control:The combination of multi-zone tungsten-rhenium thermocouples and Shimaden FP23 controllers achieves a regulation accuracy of ±0.1°C.
    ??Stable and Reliable:All gas piping and water circulation circuits undergo rigorous pressure testing to ensure leak-free operation during deposition processes lasting hundreds of hours.

Large Square CVD Furnace supports customization in various sizes ranging from 600mm to 2500mm.

Request Your Detailed Technical Proposal and Quotation Now：15115399105